CVD of Compound Semiconductors. Precursor Synthesis, Developmeny and Applications
CVD of Compound Semiconductors. Precursor Synthesis, Developmeny and Applications
ISBN:
9,78353E+12
Автор:
Jones Anthony C.
Издательство:
John Wiley & Sons Limited (prof)
Тип:
Электронная книга
Реклама. Рекламодатель ООО "Литрес" / ИНН 7719571260 / Litres.ru / Erid: 2Vtzqx9kwnn
Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials. Topics included: * techniques for compound semiconductor growth * metalorganic precursors for III-V MOVPE * metalorganic precursors for II-VI MOVPE * single-source precursors * chemical beam epitaxy * atomic layer epitaxy Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.
ISBN
9,78353E+12
Автор
Jones Anthony C.
Издательство
John Wiley & Sons Limited (prof)
Тип
Электронная книга